VST

Innovative Vacuum Technologies

About VST

VST was founded in 1982, and specializes in the design, manufacture, and service of high vacuum systems, glove boxes, and thin-film deposition systems. Since the 1990s, VST’s systems have been installed in leading universities and research facilities, factories and startup companies around the world. The systems are designed and manufactured according to customer specifications with meticulous planning and are made from high-quality components and materials, ensuring continuous and reliable operation for decades. Click here to see a sampling of our customers.

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Product Categories

Gloveboxes

VST’s gloveboxes come as standalone products or in integrated configurations with additional equipment, such as gloveboxes integrated with deep vacuum ovens or gloveboxes integrated with thin-film deposition systems. VST provides complete laboratories featuring gloveboxes that combine dry glovebox capabilities, wet gloveboxes, spin coaters, plasma cleaning systems, laboratory equipment, and more.

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Atomic Layer Deposition (ALD) Systems

ALD is a method of thin-film deposition by construction of monoatomic layers through  alternating exposure of the substrate to 2 precursors in the gas phase, in a self-limited process. This method enables deposition of high precision nanometric dielectric, semiconductor or metallic layers on flat or three-dimensional substrates.

VST has developed a unique ALD system for coating small quantities of powders using a pulse-bed method. This system is used for R&D in leading academic institutions.
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Thin Film Deposition Systems - Physical Vapor Deposition (PVD)

VST designs and manufactures systems for evaporation and sputtering of thin films used for precise coatings in industry and research and development institutes, both domestically and internationally. The systems are designed and produced according to customer requirements and include one or more process chambers, as well as a robotic load-lock chamber as needed. The systems support coatings of metals, dielectric materials, and organic materials, and are used for various applications including optics, sensors, semiconductors, microelectronics, solar cells, perovskites, superconductors, Josephson junctions, organic material photovoltaic devices, and more.

Types of Systems Designed and Manufactured by VST:

  • Thin Film Deposition Systems
  • Physical Vapor Deposition Systems
  • Atomic Layer Deposition Systems
  • Pulsed Laser Deposition Systems
  • Thermal Evaporation Systems
  • Electron-Beam (E-Beam) Evaporation Systems
  • Low Temperature Evaporation (LTE) Systems
  • Magnetron Sputtering Systems: RF, DC, Pulsed-DC, HiPIMS

All PVD systems can be fitted with ion-beam sources for:

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High Vacuum Ovens

High vacuum ovens are designed for performing thermal treatments in an oxygen-free and water-free atmosphere and are used for various applications across many industries, including electronics, microelectronics, aerospace, batteries, renewable energy, optics, metallurgy, physical research, and more.
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Environmental and Altitude Chambers

VST designs and manufactures altitude simulation chambers for the aerospace industry, replicating conditions of low pressure, heat, and cold.

VST represents leading global manufacturers in the field of environmental conditions, including rain, heat, cold, solar radiation, and more. These manufacturers design, produce, and provide systems and chambers for environmental condition testing.
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ATEQ Leak Testing Systems

ATEQ is the leading global company for leak testing systems, leak detection, and non-destructive flow control. ATEQ systems operate with dry air and offer a high sensitivity of 0.01 millibar. They feature a programmable controller with 128 programs, a large and user-friendly color display, calibration certification, built-in communication protocols such as Modbus or Profinet, and a range of I/O inputs and outputs for controlling and monitoring external devices. VST, the exclusive representative of ATEQ in Israel, designs and manufactures custom leak testing stations, particularly for enclosures, assemblies, valves, medical products, smart tags, robots, and more.
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In-line Coating Systems for Large Models and Surfaces

VST designs and manufactures in-line sputtering systems for coating large flat substrates. These coating systems are built with multiple interconnected stations, where each station performs a specific stage of the process: loading station, primary vacuum, high vacuum, plasma cleaning, coating or multiple coatings, thickness measurement, return to atmospheric pressure, and unloading station. Coating is achieved using large, elongated sources that can coat the entire surface at once.
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Service for Vacuum Systems and Thin Film Coating Systems

The VST service team includes engineers and technicians specializing in mechanics, pneumatics, vacuum technology, water, gases, electrical systems, electronics, and control. The team is experienced in the design, manufacture, refurbishment, and upgrading of high vacuum systems and thin film coating systems tailored to specific needs, such as heated or cooled substrate holders, manipulators, control systems, thermal sources, and more. Additionally, VST represents leading global companies in the fields of vacuum and thin film coatings, including Telemark, Meivac, Prevac, and others.
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Parts and Peripheral Equipment for High Vacuum and Thin Film Coatings

VST provides parts and peripheral equipment in the field of high vacuum and thin film coatings, including vacuum pumps, high and ultra-high vacuum (UHV) chambers, chillers, cryogenic cooling systems, manipulators and moving systems, rotating model holders with heating and cooling options, and more.
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Arc Melting Furnace

VST’s arc melting furnace is designed for the melting of metals and ceramics at temperatures up to 3000°C. The heat generated by the arc melts metals and even ceramics to create alloys or to remove residues. The arc produces such high temperatures that even metallic residues can be uniformly melted in a short time, while the slag is continuously extracted and removed.

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High Vacuum Furnace

High vacuum furnaces designed for thermal treatments in an oxygen-free atmosphere for small models, at high temperatures of 1000°C, 1300°C, and up to 1500°C. These furnaces are used for various applications in research and development, as well as in industry.
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Ellipsometer for Measuring Layer Thickness - J.A. Woollam Ellipsometers

J.A. Woollam is the global leader in
 the field of ellipsometry. Ellipsometry is an optical technique used to measure thickness and optical properties of thin layers, measuring the change in circular polarization upon reflection or transmission. An ellipsometer can help in assessing the quality of the thin films by including roughness, porosity and thickness uniformity. VST is the exclusive representative of J.A. Woollam and offers ellipsometers in various levels of complexity, ranging from a basic benchtop model to a model with moving sources and stages and a robotic system for production lines.
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Partners

Customers

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